图 片 |
设备名称 |
制造商 |
型号 |
年份 |
详细配置 |
状 态 |
|
Metrology |
PSS |
AccuSizer APS 780 |
2006 |
- |
国外
|
|
Semitool Raider ECD310 |
Semitool |
Raider ECD310 |
2007 |
- |
国外
|
|
Semitool Raider ECD310 |
Semitool |
Raider ECD310 |
2007 |
- |
国外
|
|
Rudolph WV320 |
Rudolph |
WV320 |
2007 |
- |
国外
|
|
Metrology |
Phoenix |
Micromex SE 160T |
2009 |
Xray tool |
国外
|
|
KOKUSAI DD-1236VN-DF |
KOKUSAI |
DD-1236VN-DF |
- |
"need exact model name"
DJ-1236V |
国外
|
|
KOKUSAI DD-1223VN |
KOKUSAI |
DD-1223VN |
- |
Single boat, CX5000 |
国外
|
|
Furnace |
ASM |
A412 |
2011 |
2boats |
国外
|
|
Mattson Steag Etch |
Mattson |
Steag |
2002 |
- |
国外
|
|
AMAT Centura Chamber Etch |
AMAT应用材料 |
Centura Chamber |
2010 |
2 x Minos, 1 x Carina, 1 x Axion, |
国外
|
|
TEL Trias CVD |
TEL |
Trias |
2010 |
- |
国外
|
|
AXCELIS Optima HDxT Implant |
AXCELIS |
Optima HDxT |
2011 |
Axcelis Optima HDxT
Roughing |
国外
|
|
Component |
Chiron |
XACT-830 |
- |
- |
国外
|
|
KLA Viper 2438 |
KLA科磊 |
Viper 2438 |
2010 |
- |
国外
|
|
KLA Tencor ES31晶圆检查系统 |
KLA科磊 |
ES31 |
2004 |
E-beam Inspection / SEMs in Micro |
国外
|
|
GEMETEC Elymat III |
GEMETEC |
Elymat III |
- |
- |
国外
|
|
AMAT NanoSEM 3D Metrology |
AMAT应用材料 |
NanoSEM 3D |
2002 |
MULTIPLE UNITS AVAILABLE. PLEASE |
国外
|
|
AMAT NanoSEM 3D Metrology |
AMAT应用材料 |
NanoSEM 3D |
2002 |
ULTIPLE UNITS AVAILBLE. PLEASE I |
国外
|
|
Multiprobe MP1 ATE |
Multiprobe |
MP1 |
2006 |
Condition Very Good, tool for mi |
国外
|
|
Novellus Inova NExT PVD |
Novellus |
Inova NExT |
2015 |
3ports, 2x AlCu, 2x Ti, Degas |
国外
|
|
Metrology |
HSEB |
AXIOSPECT 301 |
- |
- |
国外
|
|
Etch |
Shibaura |
CDE300 |
- |
Main mini environment Platform, E |
国外
|
|
WET |
Semitool |
Raider SP |
2006 |
- |
国外
|
|
KARL SUSS HVMMFT |
KARL SUSS |
HVMMFT |
- |
- |
国外
|
|
KARL SUSS HVMMFT |
KARL SUSS |
HVMMFT |
- |
- |
国外
|
|
Kinetic Systems Megapure 6001 HC |
Kinetic Systems |
Megapure 6001 HC |
- |
- |
国外
|
|
Component |
Adixen |
APR4300 |
2012 |
4 process chambers, 1 load port, |
国外
|
|
AMAT Centura Enabler Chamber Etch |
AMAT应用材料 |
Centura Enabler Chamber |
2004 |
Condition : Very Good , CE Marked |
国外
|
|
AMAT Vantage Vulcan RTP |
AMAT应用材料 |
Vantage Vulcan |
2013 |
2 Chamber RTP System |
国外
|
|
Metrology |
SOPRA |
EP12 |
- |
- |
国外
|
|
Advantest 83000 |
Advantest |
83000 |
2000 |
Tester, F330t , 64 pins |
国外
|
|
SemiProbe PS4L FA-12 ATE |
SemiProbe |
PS4L FA-12 |
2012 |
with FOUP capablity |
国外
|
|
Track |
SCREEN |
DT-3000 |
2015 |
DUO 4 CUP + 12 PCDH + 6 CP 4 CUP |
国外
|
|
TEL RLSA-H Chambers Etch |
TEL |
RLSA-H Chambers |
2011 |
Dry Etch, Bx-, Cx-, E1 layers, 30 |
国外
|
|
E.A. Fischione 2040 |
E.A. Fischione Instruments |
2040 |
- |
- |
国外
|
|
Waters 2695 |
Waters |
2695 |
- |
- |
国外
|
|
Component |
Blue M |
DCC206CY |
- |
- |
国外
|
|
AMAT Producer GT Chamber CVD |
AMAT应用材料 |
Producer GT Chamber |
2014 |
Parts Machine: 1 x Proudcer GT ch |
国外
|
|
Mattson Helios RTP |
Mattson |
Helios |
2007 |
- |
国外
|
|
Metrology |
FEI |
Ex-Situ Plucker |
2009 |
- |
国外
|
|
HITACHI HF-2000电子显微镜 |
HITACHI |
HF-2000 |
1995 |
200KeV Advanced Analytical TEM |
国外
|
|
Novellus Inova NExT PVD |
Novellus |
Inova NExT |
2013 |
3ports, 2x TiN, 2x Degas |
国外
|
|
Etch |
Nippon Scientific |
PS102W |
- |
- |
国外
|
|
Metrology |
Carl Zeiss |
LEA1530 |
2002 |
FIELD EMISSION SCANNING ELECTRON |
国外
|
|
Metrology |
FEI |
ExSolve 2 WTP EFEM |
2017 |
Main system, Handler (2ports), Pr |
国外
|
|
Metrology |
FEI |
Ex-Situ Plucker |
2008 |
- |
国外
|
|
Metrology |
JEOL |
ARM200CF Super X |
2014 |
Main system |
国外
|
|
Component |
E.A. Fischione Instruments |
1030 |
2005 |
System S/N: 14 |
国外
|
|
ANCOSYS P13010 |
ANCOSYS |
P13010 |
2011 |
- |
国外
|
|
CHECKPOINT 300 TDE |
CHECKPOINT |
300 TDE |
2011 |
Top down OBIRCH/InGaAs/LTM 9 Ghz |
国外
|
|
Metrology |
Hermes Microvision |
eP4 |
2017 |
- |
国外
|
|
HITACHI M-8190XT Etch |
HITACHI |
M-8190XT |
2013 |
3 Chambers |
国外
|
|
Metrology |
Jordan Valley |
JVX7300 |
2012 |
TFM_THK_JV |
国外
|
|
LYNCEE TEC Holographic Microscope |
LYNCEE TEC |
Holographic Microscope |
2012 |
- |
国外
|
|
TERADYNE Probe Card Interface |
TERADYNE |
Probe Card Interface |
2011 |
- |
国外
|
|
TEL Tactras Vigus-0 Etch |
TEL |
Tactras Vigus-0 |
2010 |
NCCP |
国外
|
|
TEL Certas LEAGA Etch |
TEL |
Certas LEAGA |
2016 |
In a line. SW V1.90, Certas LEAGA |
国外
|
|
Component |
VWR Scientific |
1601 |
2011 |
- |
国外
|
|
AMAT Olympia CVD |
AMAT应用材料 |
Olympia |
2015 |
2Ch ALD System, Single chamber, I |
国外
|
|
KOKUSAI DJ-1206VN-DM |
KOKUSAI |
DJ-1206VN-DM |
- |
- |
国外
|
|
KOKUSAI DJ-1206VN-DM |
KOKUSAI |
DJ-1206VN-DM |
- |
- |
国外
|
|
AMAT ACMS XT II Component |
AMAT应用材料 |
ACMS XT II |
2005 |
- |
国外
|
|
AMAT ACMS0XT-ASG-E Component |
AMAT应用材料 |
ACMS0XT-ASG-E |
2006 |
- |
国外
|
|
AMAT UVision 5 Metrology |
AMAT应用材料 |
UVision 5 |
2011 |
- |
国外
|
|
AMAT UVision 5 Metrology |
AMAT应用材料 |
UVision 5 |
2012 |
300mm G1 Load Port 2
Moving Monr |
国外
|
|
Nanometrics Q200I |
Nanometrics |
Q200I |
2002 |
2 X Indexer |
国外
|
|
LASERTEC BI100 |
LASERTEC |
BI100 |
2017 |
- |
国外
|
|
Metrology |
RORZE |
RSR160 |
2017 |
- |
国外
|
|
Component |
Brooks |
M1900 |
2018 |
- |
国外
|
|
MCC ABES-V ATE |
MCC |
ABES-V |
2001 |
BI tool (ambient / high temp only |
国外
|
|
MCC ABES-V ATE |
MCC |
ABES-V |
2001 |
single slot screen tool (ambient |
国外
|
|
Track |
SCREEN |
DT-3000 |
2013 |
DUO 4 CUP + 12 PCDH + 6 CP 4 CUP |
国外
|
|
AMAT Centura Carina Chamber Etch |
AMAT应用材料 |
Centura Carina Chamber |
- |
Chamber Only.
Carina Etch Chambe |
国外
|
|
Micro Control Abes Memory PreScreener |
Micro Control |
Abes Memory PreScreener |
2000 |
System S/N: 112, SoftwareVersion |
国外
|
|
Micro Control Abes Memory PreScreener |
Micro Control |
Abes Memory PreScreener |
1999 |
SoftwareVersion :OS/2 |
国外
|
|
Micro Control Abes Memory Test Tool |
Micro Control |
Abes Memory Test Tool |
1999 |
2 Chambers, 16 slots each |
国外
|
|
Micro Control WRP256 ATE |
Micro Control |
WRP256 |
1999 |
2 Chamber 8 Slots Each |
国外
|
|
Micro Control WRP256 ATE |
Micro Control |
WRP256 |
1996 |
SoftwareVersion :OS/2 |
国外
|
|
Camtek X- ACT Metrology |
Camtek |
X- ACT |
2012 |
- |
国外
|
|
Olympus PMG3 |
Olympus |
PMG3 |
- |
- |
国外
|
|
Semilab PS-2000 |
Semilab |
PS-2000 |
2015 |
- |
国外
|
|
Component |
ABB |
IRB120 |
2016 |
- |
国外
|
|
Component |
Advenced Control |
Advenced Control |
2001 |
- |
国外
|
|
Component |
Advenced Control |
Advenced Control |
2006 |
MEE200/WET200 CMS historical data |
国外
|
|
DISCO DFG821划片机 |
DISCO |
DFG821/F8 |
1993 |
- |
国外
|
|
Metrology |
Bruker |
Insight 3D |
2017 |
AFM, Idle in a fab, SW 8.91b36, M |
国外
|
|
Component |
Chemical Safety Technology, In |
Dual drum waste Cabinet |
- |
- |
国外
|
|
Metrology |
Met One |
3313 |
- |
- |
国外
|
|
Component |
Revco |
ULT 2140-5- D30 -40C |
- |
- |
国外
|
|
PKG |
Royal Sovereign |
RSL-2702 |
- |
- |
国外
|
|
Component |
VWR Scientific |
61161-326 |
- |
- |
国外
|
|
Component |
VWR Scientific |
1610 |
- |
- |
国外
|
|
ENTEGRIS LPDF40SS4 |
ENTEGRIS |
LPDF40SS4 |
2019 |
- |
国外
|
|
KOKUSAI DD-1223V |
KOKUSAI |
DD-1223V |
2014 |
DD-1223VN-DF/ QUIXACE-II D2 ALLOY |
国外
|
|
FSI ORION WET |
FSI |
ORION |
2011 |
- |
国外
|
|
Component |
ESCO |
EHWS 8C |
- |
- |
国外
|
|
ASML XT1250B光刻机 |
ASML |
XT1250B |
2005 |
- |
国外
|
|
Component |
Empire Abrasive Equipment |
PF-2632 M-02522 |
2006 |
Blaster leaks at
hopper and door
|
国外
|
|
Track |
SCREEN |
DT-3000 |
2015 |
DUO 4 CUP + 12 PCDH + 6 CP 4 CUP |
国外
|
|
WET |
FSI |
Antares |
2002 |
- |
国外
|
|
WET |
Semitool |
Spectrum 300 |
2012 |
- |
国外
|
|
AXCELIS Summit 300XT RTP |
AXCELIS |
Summit 300XT |
2003 |
- |
国外
|
|
Component |
Blue M |
RG-3010F-2 |
- |
- |
国外
|
|
Component |
Wilt Industries |
4106 |
- |
- |
国外
|
|
Component |
Denton |
Infinity 18 |
2002 |
- |
国外
|
|
Micro Control WRP256 ATE |
Micro Control |
WRP256 |
1999 |
- |
国外
|
|
Metrology |
Carl Zeiss |
Axiotron-2 |
- |
- |
国外
|
|
Metrology |
Carl Zeiss |
Axiotron-2 |
- |
- |
国外
|
|
Component |
FEI |
Meridian-IV |
2013 |
- |
国外
|
|
Component |
FSI |
PWB-48X38X64-3E |
2011 |
- |
国外
|
|
Component |
FSI |
PWB-48X38X64-3E |
2011 |
- |
国外
|
|
Component |
FSI |
PWB-48X38X64-3E |
2011 |
- |
国外
|
|
AMAT Endura II PVD |
AMAT应用材料 |
Endura II |
2006 |
1x DSTTN |
已售出
|
|
Metrology |
FEI |
Ex-Situ Plucker |
2011 |
- |
国外
|
|
WET |
DMS |
Tornado 200 |
2013 |
- |
国外
|
|
Akrion Component UP V2 MP.2000 |
Akrion |
UP V2 MP.2000 |
- |
Tool is sitting in Subfab |
国外
|
|
AMAT NanoSEM 3D Metrology |
AMAT应用材料 |
NanoSEM 3D |
2004 |
Installed. Operational. Loadport |
国外
|
|
AMAT NanoSEM 3D Metrology |
AMAT应用材料 |
NanoSEM 3D |
2004 |
Installed. Operational. |
国外
|
|
AMAT NanoSEM 3D Metrology |
AMAT应用材料 |
NanoSEM 3D |
2004 |
Installed. Operational. |
国外
|
|
Extraction System Inc TMB RTM |
Extraction System Inc |
TMB RTM |
- |
- |
国外
|
|
Component |
Jackson Automation |
Storage Cabinet |
- |
- |
国外
|
|
Rudolph WV320 |
Rudolph |
WV320 |
2005 |
- |
国外
|
|
Nanometrics Caliper Q300 |
Nanometrics |
Caliper Q300 |
2003 |
Overlay Measurement, Connected |
国外
|
|
Nanometrics Caliper Q300 |
Nanometrics |
Caliper Q300 |
2003 |
SEM - Critical Dimension (CD) Mea |
国外
|
|
Nanometrics Caliper Q300 |
Nanometrics |
Caliper Q300 |
2002 |
Nanometrics Caliper Inspection To |
国外
|
|
AMAT Producer GT CVD |
AMAT应用材料 |
Producer GT |
2015 |
3 Chamber: 1x SiCoNi PME, Frontie |
国外
|
|
AMAT Producer GT CVD |
AMAT应用材料 |
Producer GT |
2016 |
Frontier FRONTIER etch for Juncti |
国外
|
|
AMAT Producer GT CVD |
AMAT应用材料 |
Producer GT |
2015 |
Frontier FRONTIER etch for Juncti |
国外
|
|
AMAT Producer GT CVD |
AMAT应用材料 |
Producer GT |
2017 |
Frontier FRONTIER etch for Juncti |
国外
|
|
Ametek/Cameca EX300 |
Ametek/Cameca |
EX300 |
2011 |
Stranded, no potential reuse |
国外
|
|
Ametek/Cameca EX300 |
Ametek/Cameca |
EX300 |
2009 |
Shallow Probe Measurment Tool |
国外
|
|
Component |
FSI |
PWC-48X38X64-3E - Drying Oven |
2011 |
- |
国外
|
|
Novellus Inova XT PVD |
Novellus |
Inova XT |
2003 |
6 Chambers |
国外
|
|
Component |
QCEPT |
QCEPT |
2011 |
- |
国外
|
|
TEL Indy Irad Furnace |
TEL |
Indy Irad |
2007 |
- |
国外
|
|
IMS XTS-FT ATE |
IMS |
XTS-FT |
1998 |
- |
国外
|
|
ASM Epsilon 3200 |
ASM |
Epsilon 3200 |
2005 |
CVD |
国外
|
|
Nanometrics Caliper Q300 |
Nanometrics |
Caliper Q300 |
2002 |
Installed |
国外
|
|
Component |
Hologenix |
MTX 2000/2/MIS SLIPBAY |
2001 |
- |
国外
|
|
Packaging Systems Entry Conveyor |
Packaging Systems |
Entry Conveyor |
2018 |
- |
国外
|
|
Metrology |
M&W Products |
IPRO 7 |
2012 |
for KLA IPRO7 |
国外
|
|
Micro Lithography 7002 ATE |
Micro Lithography |
7002 |
1995 |
- |
国外
|
|
Component |
Akrion |
UP V2 MP.2000 |
1994 |
Main system 1, SMIF ALU 1 |
国外
|
|
Estion E-RETICLE V 4M |
Estion |
E-RETICLE V 4M |
2010 |
- |
国外
|
|
KLA DP2 |
KLA科磊 |
DP2 |
2012 |
DP2 Data Prep Station |
国外
|
|
Component |
Kurita |
Unknown |
2012 |
REGAS UNITS (X2) |
国外
|
|
Component |
True Refrigerator |
S-72-SCI-HC |
2017 |
- |
国外
|
|
Component |
True Refrigerator |
TS-72-SCI-HC |
2000 |
- |
国外
|
|
Component |
Air Liquide |
Fabstream III |
2019 |
SiH4 |
国外
|
|
Component |
PMS |
Surfex200 |
2013 |
- |
国外
|
|
Component |
Polycom |
ISX309 |
2015 |
- |
国外
|
|
Polycom Studio ISX321 Component |
Polycom |
Studio ISX321 |
2014 |
- |
国外
|
|
ASML XT1700Gi光刻机 |
ASML |
XT1700Gi |
2006 |
- |
国外
|
|
FSI ORION WET |
FSI |
ORION |
2005 |
- |
国外
|
|
Mosaid MS4205 ATE |
Mosaid |
MS4205 |
- |
200/400MHz, 16x16y addressing, 36 |
国外
|
|
Component |
Micro Control |
Abes IV |
- |
Condition : Fair, Burn-in Oven to |
国外
|
|
Component |
Micro Control |
WRP64 |
- |
Condition : Fair, Burn-in Oven to |
国外
|
|
Kinetic Systems Megapure 6001 HC |
Kinetic Systems |
Megapure 6001 HC |
- |
Component |
国外
|
|
Component |
MKS |
AX8559 |
- |
- |
国外
|
|
Mattson TiW Etch Tool Component |
Mattson |
TiW Etch Tool |
2002 |
Wet Etch tool, condition : Fair |
国外
|
|
Component |
Control Air |
D-9-L-SM-UM-MOD 184 |
- |
D-9-L-SM-UM LIFT,MODEL#184 TEST P |
国外
|
|
TEL Precio octo ATE |
TEL |
Precio octo |
2017 |
- |
国外
|
|
Rudolph S3000S |
Rudolph |
S3000S |
2011 |
- |
国外
|
|
Rudolph S3000SX |
Rudolph |
S3000SX |
2011 |
- |
国外
|
|
Metrology |
Phoenix |
micromex 160 |
2007 |
- |
国外
|
|
AMAT Octane G2 assy Component |
AMAT应用材料 |
Octane G2 assy |
1999 |
- |
国外
|
|
AMAT Octane G2 assy Component |
AMAT应用材料 |
Octane G2 assy |
1999 |
- |
国外
|
|
Chiron DESTIN EM ATE |
Chiron |
DESTIN EM |
2000 |
- |
国外
|
|
Chiron DESTIN EM ATE |
Chiron |
DESTIN EM |
2001 |
- |
国外
|
|
Chiron XPEQT EM ATE |
Chiron |
XPEQT EM |
2001 |
- |
国外
|
|
Chiron XPEQT EM ATE |
Chiron |
XPEQT EM |
2002 |
- |
国外
|
|
Chiron XPEQT EM ATE |
Chiron |
XPEQT EM |
2002 |
- |
国外
|
|
Chiron XPEQT EM ATE |
Chiron |
XPEQT EM |
2002 |
- |
国外
|
|
Metrology |
Jordan Valley |
BedeMetrix-F |
2006 |
Missing Parts . |
国外
|
|
Chiron DESTIN EM ATE |
Chiron |
DESTIN EM |
2000 |
- |
国外
|
|
WET |
SCREEN |
FC-3000 |
2005 |
- |
国外
|
|
SCREEN FC-3100 WET |
SCREEN |
FC-3100 |
2007 |
6 baths |
国外
|
|
Novellus Inova PVD |
Novellus |
Inova |
2014 |
MDX83x, underutilized in FAB8,
c |
国外
|
|
LAM(Novellus) Vector Express CVD |
LAM(Novellus) |
Vector Express |
2011 |
CVD34x, underutilized at FAB8, us |
国外
|
|
LAM(Novellus) Vector Express CVD |
LAM(Novellus) |
Vector Express |
2011 |
- |
国外
|
|
WET |
Semitool |
Spectrum |
- |
- |
国外
|
|
TEL Trias CVD |
TEL |
Trias |
2006 |
- |
国外
|
|
TEL Trias CVD |
TEL |
Trias |
2006 |
- |
国外
|
|
TEL Trias CVD |
TEL |
Trias |
2006 |
- |
国外
|
|
KOKUSAI DJ-1206VN-DM |
KOKUSAI |
DJ-1206VN-DM |
2005 |
- |
国外
|
|
Nanometrics Caliper |
Nanometrics |
Caliper |
2001 |
Connected. |
国外
|
|
Metrology |
Nova |
T600 |
2014 |
- |
国外
|
|
TEL LITHIUS i Track |
TEL |
LITHIUS i |
2005 |
Missing parts |
国外
|
|
RIGAKU 3272 |
RIGAKU |
3272 |
2005 |
- |
国外
|
|
AXCELIS XT300 Furnace |
AXCELIS |
XT300 |
2001 |
- |
国外
|
|
Metrology |
VEECO |
Dimension X3D |
2006 |
System S/N : 149 |
国外
|
|
Metrology |
FEI |
CLM 3D |
2011 |
- |
国外
|
|
CVD |
Novellus |
C3 Speed chms |
2002 |
- |
国外
|
|
Kinetic Systems MB 331-FDD |
Kinetic Systems |
MB 331-FDD |
2014 |
- |
国外
|
|
Sinfornia SELOP12F25-S7A0021 CMP |
Sinfornia |
SELOP12F25-S7A0021 |
2014 |
- |
国外
|
|
Perkin Elmer AANALYST 600 ATE |
Perkin Elmer |
AANALYST 600 |
2002 |
- |
国外
|
|
LTX CREDENCE D10 |
LTX CREDENCE |
D10 |
2007 |
- |
国外
|
|
Synax SX141 ATE |
Synax |
SX141 |
2005 |
- |
国外
|
|
Component |
ESPEC |
ST-120 |
1998 |
- |
国外
|
|
Component |
UVP |
C-600 |
2001 |
- |
国外
|
|