图 片 |
设备名称 |
制造商 |
型号 |
年份 |
详细配置 |
状 态 |
|
SEZ SP201 WET |
SEZ |
SP201 |
- |
: a) Post-Etch b) Backside/B |
国外
|
|
AMAT Centura DPS2 Poly Etch |
AMAT应用材料 |
Centura DPS2 Poly |
2007 |
EFEM(Kawasaki, Server), TM, 3x G5 |
国外
|
|
AMAT Centura DPS2 Poly Etch |
AMAT应用材料 |
Centura DPS2 Poly |
2007 |
EFEM(Kawasaki, Server), TM, 3x G5 |
国外
|
|
AMAT Centura AP ISPRINT CVD |
AMAT应用材料 |
Centura AP ISPRINT |
2008 |
4 xALD W CH, OS_SErver Type, AP F |
国外
|
|
AMAT P5000刻蚀机 |
AMAT应用材料 |
P5000 |
- |
CVD Mark1, 2xDLH |
国外
|
|
KLA Aleris CX |
KLA科磊 |
Aleris CX |
2007 |
[As-is] 2*loadport(TDK TAS300), Y |
国外
|
|
TEL LITHIUS Track |
TEL |
LITHIUS |
2007 |
2C5D, Inlined type(5500iZa), FOUP |
国外
|
|
TEL LITHIUS Track |
TEL |
LITHIUS |
2006 |
5C5D, Inlined type(AT-850F), FOUP |
国外
|
|
AMAT Centura Enabler E2 Etch |
AMAT应用材料 |
Centura Enabler E2 |
2010 |
EFEM(Server, Yaskawa), TM(VHP), 3 |
国外
|
|
Semitool Raider ECD WET |
Semitool |
Raider ECD |
2004 |
1 x Capsule , 2 xECD, 1 x SRD |
国外
|
|
TOYOTA IPUP T100L Component |
TOYOTA |
IPUP T100L |
- |
Loadlock Dry Pump V3.4 |
国外
|
|
Edwards STP-A2203LVS Component |
Edwards |
STP-A2203LVS |
- |
Overhauled |
国外
|
|
YOKOGAWA TS6700测试仪 |
YOKOGAWA |
TS6700 |
2003 |
PM(8), Interface board missing |
国外
|
|
YOKOGAWA TS6700测试仪 |
YOKOGAWA |
TS6700 |
2003 |
PM(8), Interface board missing |
国外
|
|
YOKOGAWA TS6700测试仪 |
YOKOGAWA |
TS6700 |
2003 |
PM9(8), Interface board missing |
国外
|
|
YOKOGAWA TS6700测试仪 |
YOKOGAWA |
TS6700 |
2003 |
For special device config / PM(8) |
国外
|
|
YOKOGAWA TS6700测试仪 |
YOKOGAWA |
TS6700 |
2004 |
System, Test Head, Work Station, |
国外
|
|
KOKUSAI VR-120SD |
KOKUSAI |
VR-120SD |
- |
Single Load port, RORZE(Robot & a |
国外
|
|
Mattson AST3000 RTP |
Mattson |
AST3000 |
2004 |
2Port Parts Machine |
国外
|
|
Mattson AST3000plus RTP |
Mattson |
AST3000plus |
2003 |
2 Port, 1xchamber, GAS : H2, N2, |
国外
|
|
Advantest M6300 |
Advantest |
M6300 |
- |
22.5mm device pitch Config(NOT St |
国外
|
|
AMAT Centura Avatar Etch |
AMAT应用材料 |
Centura Avatar |
- |
AVATAR 4x Chamber only |
国外
|
|
LAM Strip45 Chamber Etch |
LAM泛林 |
Strip45 Chamber |
2010 |
Strip45 chamber only |
国外
|
|
LAM Strip45 Chamber Etch |
LAM泛林 |
Strip45 Chamber |
2010 |
Strip45 chamber only |
国外
|
|
Mattson AST3000 RTP |
Mattson |
AST3000 |
2003 |
2 Port, 1xchamber, GAS : H2, N2, |
国外
|
|
LAM Strip45 Chamber Etch |
LAM泛林 |
Strip45 Chamber |
2010 |
Strip45 chamber only, Revolution |
国外
|
|
YOKOGAWA TS6700测试仪 |
YOKOGAWA |
TS6700 |
1995 |
Parts machine, Boards Missing |
国外
|
|
YOKOGAWA TS6700测试仪 |
YOKOGAWA |
TS6700 |
2004 |
PM(8), Interface board missing |
国外
|
|
YOKOGAWA TS6700测试仪 |
YOKOGAWA |
TS6700 |
2004 |
PM(8), Interface board missing |
国外
|
|
ATEYOKOGAWA TS6700测试仪 |
YOKOGAWA |
TS6700 |
2004 |
PM(8), Interface board missing |
国外
|
|
YOKOGAWA TS6700测试仪 |
YOKOGAWA |
TS6700 |
2003 |
PM(8), UVI-A can be failed, Inter |
国外
|
|
YOKOGAWA TS6700测试仪 |
YOKOGAWA |
TS6700 |
2004 |
PM(8), HRD*3 fail, interface boar |
国外
|
|
ASM Dragon 2300 CVD |
ASM |
Dragon 2300 |
2003 |
RC1: SiCx, RC2:Aurora2.7 |
国外
|
|
NIKON OPTIPHOT 66 |
NIKON |
OPTIPHOT 66 |
- |
[As-is] Lens:x5,x10,x20,x10, x0. |
国外
|
|
LAM(Novellus) Vector SOLA xT CVD |
LAM(Novellus) |
Vector SOLA xT |
2011 |
UV Cure |
国外
|
|
EBARA ESA25-D |
EBARA |
ESA25-D |
2010 |
for MoCVD system |
国外
|
|
EBARA ESA25-D |
EBARA |
ESA25-D |
- |
for MoCVD system |
国外
|
|
EBARA ESA25-D |
EBARA |
ESA25-D |
2008 |
for MoCVD system |
国外
|
|
EBARA ESA25-D |
EBARA |
ESA25-D |
2010 |
for MoCVD system |
国外
|
|
Komatsu G20K4-1 Scanner |
Komatsu |
G20K4-1 |
2001 |
- |
国外
|
|
Komatsu G20K4-1 Scanner |
Komatsu |
G20K4-1 |
2002 |
Part machine |
国外
|
|
AMAT Endura CL PVD |
AMAT应用材料 |
Endura CL |
2000 |
EFEM(2 Ports, Kensington), XP Rob |
国外
|
|
ASML XT1250D光刻机 |
ASML |
XT1250D |
2004 |
1) Wafer 12inch
2) Reticle-6inch |
国外
|
|
ASML XT1700FI光刻机 |
ASML |
XT1700FI |
2012 |
1700iP, uniformity(1.01%),Cymer X |
国外
|
|
AMAT Centura Enabler Etch |
AMAT应用材料 |
Centura Enabler |
2010 |
EFEM(NT, Fixed Kawasaki), TM(VHP) |
国外
|
|
AMAT Centura eMax CT+ Etch |
AMAT应用材料 |
Centura eMax CT+ |
2006 |
EFEM(Server, Single Yaskawa), TM, |
国外
|
|
AMAT Centura eMax CT+ Etch |
AMAT应用材料 |
Centura eMax CT+ |
2004 |
EFEM, TM, 3x eMaX CT+, AC Rack |
国外
|
|
GES CAYMAN CVD |
GES |
CAYMAN |
2002 |
Cayman, 2Twin( All Module Localiz |
国外
|
|
AMAT Producer SE CVD |
AMAT应用材料 |
Producer SE |
2007 |
ACL Process, 2 Twin Ch(HF_Apex301 |
国外
|
|
LAM(Novellus) Vector CVD |
LAM(Novellus) |
Vector |
2004 |
- |
国外
|
|
Electroglas EG2001X |
Electroglas |
EG2001X |
- |
- |
国外
|
|
Electroglas EG2001CX |
Electroglas |
EG2001CX |
- |
- |
国外
|
|
Electroglas EG2001X |
Electroglas |
EG2001X |
- |
- |
国外
|
|
Electroglas EG2001X |
Electroglas |
EG2001X |
- |
- |
国外
|
|
Nanometrics NanoSpec AFT 180 |
Nanometrics |
NanoSpec AFT 180 |
- |
- |
国外
|
|
KLA Surfscan 2.1 |
KLA科磊 |
Surfscan 2.1 |
- |
- |
国外
|
|
KLA MPV CD2 AMC |
KLA科磊 |
MPV CD2 AMC |
- |
- |
国外
|
|
KLA MPV CD2 AMC |
KLA科磊 |
MPV CD2 AMC |
- |
- |
国外
|
|
AMAT Orbot WF720 Metrology |
AMAT应用材料 |
Orbot WF720 |
- |
- |
国外
|
|
KLA MPV-CD |
KLA科磊 |
MPV-CD |
- |
- |
国外
|
|
KLA SFS7700 |
KLA科磊 |
SFS7700 |
- |
- |
国外
|
|
KLA Ergolux |
KLA科磊 |
Ergolux |
- |
- |
国外
|
|
KLA INM100+INS10 |
KLA科磊 |
INM100+INS10 |
- |
- |
国外
|
|
Surftens Measurement Metrology |
Surftens |
Measurement |
- |
Measurement Surftens HL 4" 6" |
国外
|
|
Electroglas EG2001X ATE |
Electroglas |
EG2001X |
- |
- |
国外
|
|
UNAXIS LLS900 PVD |
UNAXIS |
LLS900 |
- |
LLS900 |
国外
|
|
ICOS CI-5150 ATE |
ICOS |
CI-5150 |
- |
- |
国外
|
|
Multitest MT9308 ATE |
Multitest |
MT9308 |
- |
Automatic stack tube loader – tub |
国外
|
|
Multitest MT9308 ATE |
Multitest |
MT9308 |
- |
Automatic stack tube loader – tub |
国外
|
|
AXCELIS Microlite |
AXCELIS |
Microlite |
- |
- |
国外
|
|
SVG 5204 Furnace |
SVG |
5204 |
- |
- |
国外
|
|
Star 2000 Primer Component |
Star |
2000 Primer |
- |
- |
国外
|
|
AMAT AMC7811 RTP外延炉 |
AMAT应用材料 |
AMC-7811 |
1990 |
Epitaxy |
国外
|
|
AMAT AMC7800RPX RTP |
AMAT应用材料 |
AMC7800RPX |
1982 |
Epitaxy |
国外
|
|
AMAT AMC7821 RTP |
AMAT应用材料 |
AMC7821 |
1983 |
epitaxy |
国外
|
|
AMAT AMC7821 RTP |
AMAT应用材料 |
AMC7821 |
2001 |
OEM rebuild aug-2001 Epitaxy |
国外
|
|
SVG 5204 Furnace |
SVG |
5204 |
- |
- |
国外
|
|
EBARA UFP-200/300M |
EBARA |
UFP-200/300M |
- |
2 SET |
国外
|
|
Chemical Magnet Pump |
TACMINA |
MG-16H-FTF-F-60-S |
- |
1 SET |
国外
|
|
GRINDER |
JINGLV ELECTRON |
- |
- |
1 SET |
国外
|
|
OKAMOTO VG502MK2 |
OKAMOTO |
VG502MK2 |
- |
1 SET |
国外
|
|
DISCO DTU1531冷水机 |
DISCO |
DTU1531 |
- |
1 SET |
国外
|
|
Kanto Seiki U-FW-300A CHILLER |
Kanto Seiki |
U-FW-300A |
- |
1 SET |
国外
|
|
DAWON DS 3000 CHILLER |
DAWON |
DS 3000 |
- |
1 SET |
国外
|
|
HD-01A CHILLER |
- |
HD-01A |
- |
1 SET |
国外
|
|
Single SCO1 CHILLER |
Single |
SCO1 |
- |
1 SET |
国外
|
|
Saw Incarnation SI-C10 CHILLER |
Saw Incarnation |
SI-C10 |
- |
1 SET |
国外
|
|
JEIO TECH RW-JT-50L CHILLER |
JEIO TECH |
RW-JT-50L |
- |
1 SET |
国外
|
|
Daeho Auto Chiller CHILLER |
Daeho |
Auto Chiller |
- |
1 SET |
国外
|
|
JEIO TECH HX-55H CIRCULATOR |
JEIO TECH |
HX-55H |
- |
1 SET |
国外
|
|
ADT MW975 |
ADT(K&S) |
MW975 |
- |
1 SET |
国外
|
|
NEON TECH NSD-68 SPIN DRYER |
NEON TECH |
NSD-68 |
- |
1 SET |
国外
|
|
Rhetech P28SR11S-10001 SPIN DRYER |
Rhetech |
P28SR11S-10001 |
- |
1 SET |
国外
|
|
Saw Incarnation SI-S12 SPIN DRYER |
Saw Incarnation |
SI-S12 |
- |
1 SET |
国外
|
|
VERTEQ 1600-55A SPIN DRYER |
VERTEQ |
1600-55A |
- |
1 SET |
国外
|
|
NCS1200 WAFER CLEANER |
- |
NCS1200 |
- |
1 SET |
国外
|
|
HOUSING CLEANER |
- |
- |
- |
1 SET |
国外
|
|
PHOTO MASK SPINNER |
ATIS Co., Ltd |
PHOTO MASK SPINNER |
- |
1 SET |
国外
|
|
Spin Cleaning |
- |
- |
- |
1 SET |
国外
|
|
Auto Flux Cleaner |
THE SYSTEM |
TS_LAFW1000 |
- |
1 SET |
国外
|
|
DISCO DCS141清洗机 |
DISCO |
DCS141 |
- |
1 SET |
国外
|
|
NGK RC-1000A CO2 BUBBLER |
NGK |
RC-1000A |
- |
1 SET |
国外
|
|
BOMYUNG CB-C-60 CO2 BUBBLER |
BOMYUNG |
CB-C-60 |
- |
4 SET |
国外
|
|
BOMYUNG CO2 BUBBLER |
BOMYUNG |
CO2 BUBBLER |
- |
1 SET |
国外
|
|
NGK RC2000ACDS CO2 BUBBLER |
NGK |
RC2000ACDS |
- |
2 SET |
国外
|
|
NGK RC1000ACDS CO2 BUBBLER |
NGK |
RC1000ACDS |
- |
1 SET |
国外
|
|
NGK RC1000ACD CO2 BUBBLER |
NGK |
RC1000ACD |
- |
2 SET |
国外
|
|
NOMURA NDB3 CO2 BUBBLER |
NOMURA |
NDB3 |
- |
1 SET |
国外
|
|
NOMURA NDB4 CO2 BUBBLER |
NOMURA |
NDB4 |
- |
1 SET |
国外
|
|
NGK RC8000ACD CO2 BUBBLER |
NGK |
RC8000ACD |
- |
1 SET |
国外
|
|
DISCO DFD640切割机 |
DISCO |
DFD640 |
- |
6 SET |
国外
|
|
DISCO DFD650切割机 |
DISCO |
DFD650 |
- |
1 SET |
国外
|
|
DICING SAW SI-D26 |
SAW INCARNATION |
SI-D26 |
- |
1 SET |
国外
|
|
DISCO DAD522划片机 |
DISCO |
DAD522 |
- |
3 SET |
国外
|
|
SHINKAWA SPA300Super DIE BONDER |
SHINKAWA |
SPA300Super |
- |
2 SET |
国外
|
|
SHINKAWA SPA300 DIE BONDER |
SHINKAWA |
SPA300 |
- |
1 SET |
国外
|
|
SHINKAWA SPA400 |
SHINKAWA |
SPA400 |
- |
7 SET |
国外
|
|
ASM AD830 |
ASM |
AD830 |
- |
4 SET |
国外
|
|
ASM AD838L |
ASM |
AD838L |
- |
1 SET |
国外
|
|
ASM IS8912DA固晶机 |
ASM |
IS8912DA |
- |
1 SET |
国外
|
|
ASM AD809 |
ASM |
AD809 |
- |
1 SET |
国外
|
|
ASM AD8930 |
ASM |
AD8930 |
- |
5 SET |
国外
|
|
ASM AD8930V |
ASM |
AD8930V |
- |
3 SET |
国外
|
|
PANASONIC DM60M-H |
PANASONIC |
DM60M-H |
- |
2 SET |
国外
|
|
LST LAB1200 |
LST |
LAB1200 |
- |
1 SET |
国外
|
|
Hoson GS850-PL |
Hoson |
GS850-PL |
- |
1 SET |
国外
|
|
Zeu Elex CM-100M |
Zeu Elex |
CM-100M |
- |
1 SET |
国外
|
|
Zeu Elex CM-100B |
Zeu Elex |
CM-100B |
- |
2 SET |
国外
|
|
ASM IS-600 |
ASM |
IS-600 |
- |
1 SET |
国外
|
|
ASM AD8930UV |
ASM |
AD8930UV |
- |
1 SET |
国外
|
|
ROSWIN SUPER120 |
ROSWIN |
SUPER120 |
- |
2 SET |
国外
|
|
ROSWIN SUPER121 |
ROSWIN |
SUPER121 |
- |
2 SET |
国外
|
|
ROSWIN SUPER140 |
ROSWIN |
SUPER140 |
- |
2 SET |
国外
|
|
Bright Lux DB388TL |
Bright Lux |
DB388TL |
- |
1 SET |
国外
|
|
ASM ISLINDA |
ASM |
ISLINDA |
- |
4 SET |
国外
|
|
SHINKAWA COF300 |
SHINKAWA |
COF300 |
- |
7 SET |
国外
|
|
SHINKAWA COF1000 |
SHINKAWA |
COF1000 |
- |
1 SET |
国外
|
|
SHIBAURA TFC-2100-02 |
SHIBAURA |
TFC-2100-02 |
- |
2 SET |
国外
|
|
TOP ENGINEERING TIS-3000 |
TOP ENGINEERING |
TIS-3000 |
- |
1 SET |
国外
|
|
SHIBAURA TFC-3200H |
SHIBAURA |
TFC-3200H |
- |
1 SET |
国外
|
|
LAURIER DS9000 |
LAURIER |
DS9000 |
- |
1 SET |
国外
|
|
STI ISORT |
STI |
ISORT |
- |
1 SET |
国外
|
|
STI duraSORT |
STI |
duraSORT |
- |
1 SET |
国外
|
|
DATACON Fito-F3100 |
DATACON |
Fito-F3100 |
- |
1 SET |
国外
|
|
APTECH PP-R20 |
APTECH |
PP-R20 |
- |
1 SET |
国外
|
|
MUSASHI FAD2300 2S |
MUSASHI |
FAD2300 2S |
- |
3 SET |
国外
|
|
MUSASHI FAD2300 2L |
MUSASHI |
FAD2300 SL |
- |
1 SET |
国外
|
|
MUSASHI SM300S-3A |
MUSASHI |
SM300S-3A |
- |
1 SET |
国外
|
|
MUSASHI FAD2200 |
MUSASHI |
FAD2200 |
- |
1 SET |
国外
|
|
MUSASHI FAD2200D |
MUSASHI |
FAD2200D |
- |
1 SET |
国外
|
|
PROTEC FDS-1000M |
PROTEC |
FDS-1000M |
- |
1 SET |
国外
|
|
PROTEC FDS-1000 |
PROTEC |
FDS-1000 |
- |
1 SET |
国外
|
|
PROTEC Innovation T |
PROTEC |
Innovation T |
- |
1 SET |
国外
|
|
PROTEC FDS-5000DM |
PROTEC |
FDS-5000DM |
- |
2 SET |
国外
|
|
PROTEC FDS-5000M |
PROTEC |
FDS-5000M |
- |
4 SET |
国外
|
|
PROTEC Phantasm ( 4 head ) |
PROTEC |
Phantasm ( 4 head ) |
- |
2 SET |
国外
|
|
MUSASHI TAD-1000M |
MUSASHI |
TAD-1000M |
- |
1 SET |
国外
|
|
ASYMTEK X-1020 |
ASYMTEK |
X-1020 |
- |
2 SET |
国外
|
|
PROTEC FDS-1000MS |
PROTEC |
FDS-1000MS |
- |
1 SET |
国外
|
|
PROTEC PHANTASM-MSS |
PROTEC |
PHANTASM-MSS |
- |
1 SET |
国外
|
|
CS ENG CSX-W220 |
CS ENG |
CSX-W220 |
- |
1 SET |
国外
|
|
CS ENG Wafer Expander |
CS ENG |
Wafer Expander System |
- |
1 SET |
国外
|
|
Mitutoyo HM-124 |
Mitutoyo |
HM-124 |
- |
1 SET |
国外
|
|
JT CORPORATION JAI-D300 |
JT CORPORATION |
JAI-D300 |
- |
1 SET |
国外
|
|
Rudolph NSX 320+SWS |
Rudolph |
NSX 320+SWS |
- |
1 SET |
国外
|
|
MACRO DEFECT INSPECTOR |
August Technology |
WHS |
- |
1 SET |
国外
|
|
KLA CI-T53P |
KLA科磊 |
CI-T53P |
- |
1 SET |
国外
|
|
KLA ICOS T830测试系统 |
KLA科磊 |
ICOS T830 |
- |
1 SET |
国外
|
|
HANRA HRI-580L |
HANRA |
HRI-580L |
- |
2 SET |
国外
|
|
STI HEXA Whizz |
STI |
HEXA Whizz |
- |
1 SET |
国外
|
|
Rudolph NSX105 |
Rudolph |
NSX105 |
- |
1 SET |
国外
|
|
AVI DVI-C160 |
NATIONAL INSTRUMENTS |
DVI-C160 |
- |
1 SET |
国外
|
|
Vision Inspection |
KWONSYS |
KWONSYS |
- |
1 SET |
国外
|
|
Vision Inspection |
KWONSYS |
KWONSYS |
- |
1 SET |
国外
|
|
TAYLOR HOBSON PGI840 |
TAYLOR HOBSON |
PGI840 |
- |
1 SET |
国外
|
|
KOREA FUTURE TECH KFT-LM-01 |
KOREA FUTURE TECH |
KFT-LM-01 |
- |
1 SET |
国外
|
|
DYNATECH DT-TR304-PR |
DYNATECH |
DT-TR304-PR |
- |
1 SET |
国外
|
|
DYNATECH DT-ECS2030-PR |
DYNATECH |
DT-ECS2030-PR |
- |
1 SET |
国外
|
|
DISCO DFL7160激光切割机 |
DISCO |
DFL7160 |
- |
1 SET |
国外
|
|
KOSES KIM 509 |
KOSES |
KIM 509 |
- |
1 SET |
国外
|
|
EO Technics SLD-402 |
EO Technics |
SLD-402 |
- |
1 SET |
国外
|
|
LASER Sourse |
LEE LASER INC |
818CQ / 40 / CED |
- |
1 SET |
国外
|
|
Lumonics LW-Spe |
Lumonics |
LW-Spe |
- |
1 SET |
国外
|
|
EO Technics SC-700 |
EO Technics |
SC-700 |
- |
1 SET |
国外
|
|
EO Technics SCF-200H |
EO Technics |
SCF-200H |
- |
1 SET |
国外
|
|
Hae Sung Engineering MLM-HSE01083 |
Hae Sung Engineering |
MLM-HSE01083 |
- |
1 SET PCB MARKING SYSTEM |
国外
|
|
HANKUK MACSA NANO F |
HANKUK |
MACSA NANO F |
- |
1 SET |
国外
|
|
HANMI HMP-260TB Mold |
HANMI |
HMP-260TB |
- |
1 SET |
国外
|
|
SEC TIPS435A |
SEC |
TIPS435A |
- |
4 SET |
国外
|
|
MICROSCOPE |
HIROX KOREA' |
CX-5040-RZ'FOK-150W |
- |
1 SET |
国外
|
|
Light Controller |
FIBER OPTICS KOREA |
- |
- |
1 SET |
国外
|
|
OLYMPUS OLS3000 |
OLYMPUS |
OLS3000 |
- |
1 SET |
国外
|
|
USION HISOMET |
USION |
HISOMET |
- |
1 SET |
国外
|
|
MICROSCOPE |
HIROX KOREA |
- |
- |
1 SET |
国外
|
|
MITUTOYO QS250Z1J |
MITUTOYO |
QS250Z1J |
- |
1 SET |
国外
|
|
IMS MI-1100 |
- |
IMS MI-1100 |
- |
1 SET |
国外
|
|
3D MEASURING MACHINE |
TSE |
VSP6000 |
- |
1 SET |
国外
|
|
JEOL JSM6380A |
JEOL |
JSM6380A |
- |
1 SET |
国外
|
|
STATIC CHECKING INSTRUMENT |
- |
XK3150 |
- |
1 SET |
国外
|
|
GONIOPHOTOMETER |
WITHLIGHT |
OPI-305 |
- |
1 SET |
国外
|
|