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- 技术服务：
- 国外二手半导体设备
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制造商：Mattson
型号：Helios
规格参数：
Model NumberHandling 3 Foup
temp.ambient40℃/class A
frequency50/60 Hz
power250 kVA
primary full load current310 A
secondary full load current361 A
short circuit interrupt11.5 kA
vector groupDyn5
short circuit voltage2.7%
protection classIP23
wiring configuration3phase/GND
weightapprox.1250Kg
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