SP1-TBIEquipment Make: KLA-Tencor
Equipment Model: SP 1-TBI
Wafer Size: 8,12inch
Equipment Configuration
- Windows NT, RAM 523700 KB
- SP1 SW version 3.50.2304
- Oblique Option, XY Enhancement
- 488 nm 30mW Argon – Ion Laser wavelength
- Optics configuration: DWO,DNO,DWN,DNN
- Note： DWO: Dark field Wide channel Oblique path, DNO: Dark field Narrow
channel Oblique path / DWN:Dark field Wide channel Normal path, DNO : Dark field
Narrow channel Normal path
- Max sensiti |
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