SFS6200设备完整不缺件,已翻新好在美国8".
0.1 micron Defect Sensitivity (PSL STD)
0.02 ppm Haze Sensitivity
0.002 ppm Haze Resolution
Accuracy within 1%
XY coordinates
Lock Down accessories
Tencor approved blower assembly
30mW New Ar-Laser
208V/60HZ, 17A
MS-DOS 6.22,Windows 3.1
Software version: 2.1 |