| 龙玺精密-为您提供Aixtron Aix 2600G3 HT MOCVD设备设备买卖+翻新全套解决方案
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| 编 号：2267 (发布时间:2022.5.24) |
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| 名 称：Aixtron Aix 2600G3 HT MOCVD设备 |
| 厂 商：Aixtron |
| 型 号：Aix 2600G3 HT |
| 年 份：2006 |
| 状 态：国外 |
Aix 2600G3 HTIII-N Process
Planetary reactor
With (8) satellites, 1" x 4" / 3" x 2"
Up to 8" x 4" / 24" x 2"
Maximum process temperature: 1200°C
(8) MO Sources
(6) Standards
(2) Diluted
TMGa
TEGa
TMAl
(2) TMIn
Cp2Mg
NH3, Single line
(2) MFCs
SiH4, Two lines
H2 Purifier
Palladium diffusion cell
N2 and NH3 Purifier
MBRAUN Glovebox
EBARA Dry process pump
HUTTINGER RF Generator
Reactor ceiling
With viewport
LAYTEC Epicurve Reflectometry / Pyrometry / In-situ bow measurement
LAUDA Baths f |
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| 龙玺精密-为您提供二手Aixtron Aix 2600G3 HT MOCVD设备买卖+翻新全套解决方案，国内半导体工艺设备非标定制。龙先生18868521984(微)
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