SP2300mm,真空处理与三重FIMS;
全面翻新和校准,在洁净室中.
Currently configured for 300mm, Vacuum Handling with Triple FIMS
All SP2 are fully refurbished and calibrated and in cleanroom.
Specifications:
Windows System: Windows XP SP3
Main S/W: NGS 5.4 SR2
Wafer Size: 300mm
Stations
3 x AdvanTag SW CID, Phx, TDK (load port)
8 user-configurable LEDs to display the loadport status
Load/unload button for manual delivery hand-off
Cassette / wafer mapping which allows the tool to generate a wafer map of the 300mm |
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