Gamma2C1D, 1HMDS, 3HP, 1CP, Specification: 1. 8inch Si Wafer, 2. Coating Uniformity: < 1.0%, 3. Spin RPM: 0 ~ 6000 rpm, 4. max. Accuracy: 1 rpm, 5. Acceleration: 10~30000 rpm/s, 6. Temp Range: H.P - 60~250℃(±0.5), C.P - 20~25 ℃(±0.2), HMDS 60~200℃(±0.6) |