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| 龙玺精密-为您提供大束流离子注入机设备买卖+翻新全套解决方案
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| 编 号：802 (发布时间:2026.8.21) |
咨询此设备请加我微信 |
| 名 称：AXCELIS-NV 10-160大束流离子注入机 |
| 厂 商：AXCELIS |
| 型 号：NV 10-160 |
| 年 份：- |
| 状 态：国外 |
NV 10-160Maximum implant energy - 160 keV
Beam current range - 0.5 - 8mA
Wafer sizes - 3", 4", 5" 6" capable
End station - Manual load
Automatic wafer handling - No AT4
Source - Standard
Gas box - 4 ELB strings
Vacuum - Dry pump + diffusion pump
Control system - Standard console
Included Disks
• 4” 2-pt clamp (2)
• 6” Clampless (4)
• 4” Clampless (2)
• 6” Full Ring
• 4” Full Ring 0 deg.
•4” Full Ring (4)
•3” 2-pt
•3” Full Ring
Spare Part |
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| 龙玺精密-为您提供二手大束流离子注入机买卖+翻新全套解决方案。龙先生18868521984(微)
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