E500 EHP8"设备完整不缺件,2011年由OEM翻新,2025年底下线拆机并装箱,目前已停机在洁净室中;
Configuration
Bernas Ion Source
Open Cassette
Software - 15.10 Rev A
RW DVD Floppy Drive
Remote Service Monitor
SECS/GEM
Cooled Platen
OnBoard Cryos
Cryo N2 Heater
SDS
Signal Tower
Beam Energy Probe
Beam Purity Check Software
Fast Parametric Software
Hall Probe
Reversing Source Magnet
15amp Arc Power Supply
EHP Beam Current
EHP Source Bushing
EHP Metals Kit
10” Target Cryo
Load Lock Turbos (EHP)
V-250 Load Lock Turbo
EHP Wa |
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