OP5240设备完整不缺件,已翻新;
Fully refurbished system for 150 & 200mm wafer
Software : Window NT
TFMS version: V2.3R1
Measurement tool : BPR, BPE, VAS, BB, SE, AE
DUVSE (220-840nm)
BPR - Beam Profile Reflectometry : still the best way to characterize dielectric
films
BPE - TWI patented Beam Profile Ellipsometer
VAS(Visible Spectroscopy) : 470-800 nm
BB(DUV Spectroscopy) : 190-840 nm
AE(Absolute Ellipsometer) - the most stable gate-oxide measurement available |
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