NSR-1505G7ENIKON NSR 1505 G7E Stepper, 6"
R134 included
(2) Carriers with (25) wafers
Si-wafer with SEMI-flat
13-Slots
Reticles: 90 mil
Exposure field: 15-15 mm
Reticle: 75 mm
Integrator: 500 mW/cm2
436 nm (G-line)
reduction: 5x
NA: ~0.54
Coolant climate chamber: 21.0°C
Camera upgraded to PMT
LSA and WGA
Operating system: Windows NT
1990 vintage.
咨询此设备请加我微信
