NSR-S204BManufacturer : NIKON Inline_Cot / Dev : TEL ACT8 Inline : Left Wafer specifications : Φ8 Orifura Wafer Chuck : Mitsubishi Nano Flat II
Reticle specification : 6 inch NIKON cassette
Number of reticle libraries : 10 sheets x 2 stages (20 sheets in total) With PPD With RBCR Laser Type : GIGA G20K2 / Serial: 5069 Chamber Type : ASAHI N5Z-A / Serial: N5Z1901 Operating status : In operation